TY  - BOOK
AU  - OHMI,TADAHIRO
TI  - ULTRACLEAN TECHNOLOGY HANDBOOK : VOLl 1 : ULTRAPURE WATER / 
U1  - Ref 
PY  - 1993///
CY  - [S.N] : 
PB  - MARCEL DEKKER, INC ، 
KW  - MANUFACTURING PROCESSES
ER  -